Interferometer thermal stability optimization method based on optical-mechanical thermal integration analysis
The invention relates to a Doppler differential interferometer, in particular to an interferometer thermal stability optimization method based on optical-mechanical thermal integration analysis, which is used for solving the problems that only ideal thermal deformation is considered during thermal c...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a Doppler differential interferometer, in particular to an interferometer thermal stability optimization method based on optical-mechanical thermal integration analysis, which is used for solving the problems that only ideal thermal deformation is considered during thermal compensation design of the conventional Doppler differential interferometer; in the prior art, the change of a reference optical path difference between two arms of the Doppler differential interferometer caused by actual thermal deformation is not considered, so that the actual phase thermal drift is greater than a theoretical design value, and the wind measurement precision of the Doppler differential interferometer is reduced. According to the interferometer thermal stability optimization method based on optical-mechanical thermal integration analysis, rigid body displacement and high-order surface type errors of all optical surfaces are obtained through finite element analysis in combination with Zernike polynom |
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