METHOD AND APPARATUS FOR ACOUSTIC TESTING OF MEMS DEVICES

An embodiment provides a method for acoustic testing of at least one MEMS device of a plurality of MEMS devices. The method comprises the step of providing at least one MEMS device. In addition, the method includes the step of exciting the at least one MEMS device to generate acoustic vibrations. In addition, the method comprises the step of detecting the acoustic vibrations of the at least one MEMS device by at least one sound sensor. Further, the method comprises the step of evaluating the acoustic vibrations detected by the at least one MEMS device by the at least one sound sensor to test the at least one MEMS device for a target function. 实施例提供一种用于对多个MEMS设备中的至少一个MEMS设备进行声学测试的方法。所述方法包括提供至少一个MEMS设备的步骤。另外，所述方法包括激发所述至少一个MEMS设备以产生声学振动的步骤。另外，所述方法包括通过至少一个声音传感器对所述至少一个MEMS设备的所述声学振动进行检测的步骤。另外，所述方法包括评估所述至少一个MEMS设备通过所述至少一个声音传感器检测的所述声学振动，以针对目标功能测试所述至少一个MEMS设备的步骤。