Method and device for determining exposure energy and manufacturing system

The invention provides an exposure energy determination method and apparatus, and a manufacturing system. The determination method comprises the steps of obtaining a previous batch exposure energy value, a previous batch critical dimension value and a previous batch delay time value of a previous batch of products sent by a manufacturing execution system; obtaining a first slope, a second slope and a target critical dimension value; the target exposure energy value is determined at least by adopting the previous batch exposure energy value, the first slope, the previous batch critical dimension value, the target critical dimension value, the previous batch delay time value and the second slope, the previous batch delay time value and the second slope are used for correcting the target critical dimension value, it is guaranteed that the target exposure energy value is relatively accurate, and the accuracy of the target exposure energy value is improved. According to the technical scheme, the target key size va