Microchip transfer device and microchip transfer method

The invention relates to the technical field of semiconductor devices, and discloses a microchip transfer device and a microchip transfer method.The microchip transfer device comprises a contact used for transferring a microchip and a probe used for driving the contact to adjust the pose, the contac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NIE JINHUI, ZHENG QUANSHUI, YANG DINGLIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of semiconductor devices, and discloses a microchip transfer device and a microchip transfer method.The microchip transfer device comprises a contact used for transferring a microchip and a probe used for driving the contact to adjust the pose, the contact is made of a transparent material, the probe and the contact are arranged in an offset mode, and the probe is used for driving the contact to adjust the pose. And the probe and the contact are fixedly connected or integrally formed. The microchip transfer device provided by the invention can provide favorable conditions for an operator to observe from the upper part by using a microscope, so that the accuracy of microchip transfer operation is improved. 本发明涉及半导体器件的技术领域,公开了一种微型片转移装置和微型片转移方法,微型片转移装置包括用于转移微型片的触头以及用于驱动所述触头调整位姿的探针,所述触头采用透明材料制成,所述探针与所述触头偏置,且所述探针与所述触头固定连接或一体成型。本发明提供的微型片转移装置能够为操作人员使用显微镜从上方观察提供有利条件,从而提高微型片转移操作的精确度。