Pore-filling leveling agent and acidic copper electroplating bath containing same

The invention provides a hole-filling leveling agent and an acidic copper electroplating bath containing the same. The leveling agent is formed by reacting an amino glycidyl compound, a secondary amine compound and an alkylating reagent, the acid copper electroplating bath comprises the hole-filling...

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Bibliographische Detailangaben
Hauptverfasser: LEI HUASHAN, DUAN XIAOLONG
Format: Patent
Sprache:chi ; eng
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