Flexible butt joint locking device

The invention relates to a flexible butt-joint locking device which comprises a wafer manipulator, fork arms, butt-joint plugs, a wafer fork storage library and wafer forks, a plurality of fork arms are arranged at the driving end of the wafer manipulator, the fork arms are provided with the butt-joint plugs, a plurality of storage racks are uniformly arranged on the wafer fork storage library in the Z-axis direction, and the wafer fork storage library is provided with the wafer forks. A wafer fork is arranged on the storage frame in the X-axis direction, the butt joint plug is connected with the wafer fork in the negative direction of the X-axis, and a plurality of clamping adjusting mechanisms are evenly arranged at the bottom of the storage frame in the X-axis direction. Normal locking is achieved through double-shaft positioning, double-clamping-groove self-locking and double springs, loosening is prevented, and the clamping function and the unlocking function are both achieved. 本发明涉及一种柔性对接锁紧装置，包括晶圆机械手、叉臂