Tandem type multifunctional molybdenum boat assembly and evaporation method based on assembly
According to the tandem type multifunctional molybdenum boat assembly and the evaporation method based on the tandem type multifunctional molybdenum boat assembly, a plurality of single-head molybdenum boats are connected together in series to form the molybdenum boat assembly capable of containing...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | According to the tandem type multifunctional molybdenum boat assembly and the evaporation method based on the tandem type multifunctional molybdenum boat assembly, a plurality of single-head molybdenum boats are connected together in series to form the molybdenum boat assembly capable of containing a plurality of crucibles, so that the molybdenum boat assembly can bear various kinds of liquid medicine at the same time, the various kinds of liquid medicine can be arranged in the different crucibles respectively, mutual reaction is avoided, and the evaporation efficiency is improved. According to the invention, the substrate does not need to blow in a furnace to replace liquid medicine in the multi-layer plating process, so that a middle film layer is prevented from being polluted by air, the uniformity of the film layers and the adhesive force between the film layers are ensured, and the vacuum coating effect of the substrate is improved. Meanwhile, the single-head molybdenum boats with different resistance va |
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