High-temperature susceptor with shaft having low thermal conductivity

The present application relates to a susceptor for use at a high temperature having a shaft with low thermal conductivity, in which in the susceptor, a plate for wafer mounting and a shaft coupled to the plate are included, the plate and the shaft each comprise a sintered body having an AlN phase of 90 wt% or more, the sintered body of the plate is a magnesium-containing AlN sintered body having a volume resistance of 5 * 108 Omega * cm or more at 650 DEG C, and the sintered body of the plate is a magnesium-containing AlN sintered body having a volume resistance of 5 * 108 Omega * cm or more at 650 DEG C. And the sintered body of the shaft is an AlN sintered body having a room temperature thermal conductivity of 100 W/mK or less. 本申请涉及一种具有低热导率的轴的高温下使用的基座，其中在基座中，包括用于晶圆安装的板和联接到该板的轴，板和轴各自包括具有90wt％或更大的AlN相的烧结体，板的烧结体是在650℃下具有5*108Ω·cm或更大的体积电阻的含镁AlN烧结体，并且轴的烧结体是具有100W/mK或更低的室温热导率的AlN烧结体。