Wafer cleaning device with automatic feeding function

The invention discloses an automatic feeding wafer cleaning device, and relates to the technical field of semiconductor material manufacturing. An outer cylinder is fixedly installed on the upper side of the fixing disc, a connecting cylinder is arranged on the outer circumference of the rotating sh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CAI CHAO, PAN YULU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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