Electro-optical modulator and manufacturing method thereof

The electro-optical modulator comprises a substrate layer, a buried layer, a waveguide layer, a coating layer and an electrode layer which are stacked in sequence, the electrode layer comprises a signal electrode and grounding electrodes distributed on the two sides of the signal electrode, and load...

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Bibliographische Detailangaben
Hauptverfasser:	LI YANG, LIU JIAWEI, YUE GONGCHENG, XIAO YIHONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	The electro-optical modulator comprises a substrate layer, a buried layer, a waveguide layer, a coating layer and an electrode layer which are stacked in sequence, the electrode layer comprises a signal electrode and grounding electrodes distributed on the two sides of the signal electrode, and loading electrode sets are arranged between the sides of the signal electrode and the grounding electrodes on the corresponding sides; the signal electrode and the grounding electrode on one side of the signal electrode are distributed on the two sides of the modulation arm, and the signal electrode and the grounding electrodes on the two sides of the signal electrode are formed on the coating layer; the loading electrode group comprises two loading electrodes arranged on the two sides of the modulation arm, each loading electrode comprises a double-capacitor structure arranged periodically, and each double-capacitor structure comprises a lower capacitor formed in the coating layer, and an upper capacitor and a connect