Low-frequency FBG acceleration sensor based on symmetrical cantilever beams and manufacturing method thereof

The invention discloses a low-frequency FBG acceleration sensor based on symmetrical cantilever beams and a manufacturing method thereof, and relates to the technical field of optical fiber sensing. The acceleration sensor comprises a cantilever beam, a mass block and an FBG. Firstly, according to a mechanical model of a sensor structure, a sensitivity and inherent frequency expression of the sensor is deduced; then, structural parameter optimization is carried out on the sensor, and static stress and modal analysis is carried out on the sensor by adopting ANSYS Workbench; and finally manufacturing the sensor according to an analysis result. The inherent frequency of the sensor is 72 Hz, the sensitivity is 681.7 pm/g, the transverse interference resistance is smaller than 4.9%, the size is only 6.48 cm < 3 >, and the sensor can be used for real-time monitoring of low-frequency weak vibration signals below 50 Hz. 本发明公开了一种基于对称悬臂梁的低频FBG加速度传感器及其制作方法，涉及光纤传感技术领域。该加速度传感器包括：悬臂梁、质量块和FBG。首先根据传感器结构的力学模型，推导出传感器的灵敏度和固有频率表