Liquid supply system for static pressure air bearing and control method of liquid supply system

The invention relates to the technical field of compressors, and discloses a control method of a liquid supply system for a static pressure air bearing, when the tank pressure is low and is smaller than or equal to the first pressure, liquid is supplemented to an air supply tank preferentially throu...

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Bibliographische Detailangaben
Hauptverfasser: RU ZHIPENG, GU FAHUA, WEN HUAQIANG, ZHU FANGNENG, YUAN PENG, WANG SHENWANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of compressors, and discloses a control method of a liquid supply system for a static pressure air bearing, when the tank pressure is low and is smaller than or equal to the first pressure, liquid is supplemented to an air supply tank preferentially through a condenser, and the pressure of the air supply tank is gradually increased along with liquid supplementing; and liquid is supplemented to the gas supply tank through the evaporator and the condenser. A low-temperature and low-pressure refrigerant in the evaporator is sprayed downwards from the top of the gas supply tank through the spraying device and exchanges heat with gas at the upper part of the gas supply tank to liquefy the gas, so that the tank pressure is reduced. In the double-side liquid supplementing process, when the tank pressure drops and is smaller than the second pressure, liquid supplementing through the evaporator is stopped, liquid supplementing is conducted to the upper limit of the liquid l