Graphene-molybdenum disulfide heterojunction nanopore biosensor structure and preparation method thereof

The invention discloses a graphene-MoS2 heterojunction nanopore biosensor structure and a preparation method thereof. The graphene-MoS2 heterojunction nanopore biosensor structure comprises a silicon nitride thin film layer, a graphene thin film layer and a MoS2 thin film layer, the silicon nitride thin film layer is partially suspended, and the suspended part is provided with a micron-sized porous structure; the graphene thin film layer is arranged on the upper surface of the silicon nitride thin film layer and covers the micron-sized porous structure; the MoS2 thin film layer is arranged on the upper surface of the graphene thin film layer, and the MoS2 thin film layer and the graphene thin film layer form a heterojunction of an up-down stacked structure. The graphene thin film layer and the MoS2 thin film layer are provided with nano-pores, and the nano-pores are located in the range of the micron-sized porous structure region. According to the invention, on the premise of ensuring high spatial resolution,