Capacitive pressure sensor and preparation method thereof

The invention provides a capacitive pressure sensor and a preparation method of the capacitive pressure sensor. The capacitive pressure sensor comprises a flexible circuit board and an elastic material layer. An upper electrode and a lower electrode which are arranged at an interval are formed on th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LUO DAMING, ZHANG GUANQUN, HU YINGZHE, XU ZHENGDI, LYU YONGJIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a capacitive pressure sensor and a preparation method of the capacitive pressure sensor. The capacitive pressure sensor comprises a flexible circuit board and an elastic material layer. An upper electrode and a lower electrode which are arranged at an interval are formed on the flexible circuit board, the upper electrode is arranged above the lower electrode after the flexible circuit board is turned over, and the upper electrode and the lower electrode are arranged in parallel; the elastic material layer is arranged between the upper electrode and the lower electrode. The preparation method of the capacitive pressure sensor comprises the following steps: manufacturing a flexible circuit board, wherein the flexible circuit board is provided with an upper electrode and a lower electrode which are arranged at an interval; printing an elastic material layer on the surface of the upper electrode, and curing the elastic material layer; the surface, away from the upper electrode, of the elast