High-entropy fluorite oxide target material and preparation method thereof

The preparation method comprises the following steps: S1, weighing ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder, respectively putting the ZrO2 powder, the HfO2 powder, the CeO2 powder, the Y2O3 powder, the La2O3 powder and the Pr6O11 powder into a crucible, and...

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Bibliographische Detailangaben
Hauptverfasser: HOU JIADONG, CHENG FUHAO, WANG XIAOMIN, CHENG CHUFEI, MIAO YANG
Format: Patent
Sprache:chi ; eng
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