High-entropy fluorite oxide target material and preparation method thereof

The preparation method comprises the following steps: S1, weighing ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder, respectively putting the ZrO2 powder, the HfO2 powder, the CeO2 powder, the Y2O3 powder, the La2O3 powder and the Pr6O11 powder into a crucible, and...

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Hauptverfasser: HOU JIADONG, CHENG FUHAO, WANG XIAOMIN, CHENG CHUFEI, MIAO YANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The preparation method comprises the following steps: S1, weighing ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder, respectively putting the ZrO2 powder, the HfO2 powder, the CeO2 powder, the Y2O3 powder, the La2O3 powder and the Pr6O11 powder into a crucible, and calcining in a muffle furnace to remove moisture and impurities; s2, the calcined ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder are mixed and placed in a planetary ball mill, and after ball milling is finished, slurry is placed in a drying box to be dried to obtain high-entropy ceramic powder with uniform components; s3, the high-entropy ceramic powder is granulated and then sequentially put into a hydraulic machine and a cold isostatic pressing machine to be pressed, and a ceramic green body is obtained; and S4, the ceramic green body is placed in an atmosphere sintering furnace, a (ZrHfCeYLaPr) O2-delta high-entropy ceramic block body is obtained, then the (ZrHfCeYLaPr) O2-del