Substrate processing apparatus and method of manufacturing same

According to one embodiment of the present invention, there may be provided a liquid processing apparatus and a substrate processing method, the liquid processing apparatus including: a substrate supporting unit including a chuck supporting a substrate therebelow; a fluid supply unit that supplies a processing fluid to the substrate; and a recovery unit configured to surround a periphery of the chuck and recover the supplied processing fluid. At this time, the substrate supporting unit is formed by mixing a static electricity removing material, which is processed into milled carbon fibers (MCF, Milled Carbon Fiber) having a shorter fiber length than common carbon fibers, in a PFA resin, so that static electricity generated on the surface of the substrate or in the processing apparatus can be effectively removed during the process. 根据本发明的一实施例，可以提供一种液体处理装置以及基板处理方法，液体处理装置包括：基板支承单元，包括在下方支承基板的卡盘；流体供应单元，向所述基板供应处理流体；以及回收单元，配置成环绕所述卡盘的周边并回收被供应的所述处理流体。此时，所述基板支承单元由在PFA(Perfluoroalkoxy alkane)树脂中混合与普通碳纤维相比加工成纤维长度短的磨碎碳纤维(