Defect detection method and system, electronic equipment and storage medium

The invention provides a defect detection method and system, electronic equipment and a storage medium, and belongs to the technical field of wafer surface defect visual detection. The method comprises the following steps: constructing a defect-free image sample set by using a plurality of obtained...

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Bibliographische Detailangaben
Hauptverfasser: FENG XI, MA TIEZHONG, GUO MENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a defect detection method and system, electronic equipment and a storage medium, and belongs to the technical field of wafer surface defect visual detection. The method comprises the following steps: constructing a defect-free image sample set by using a plurality of obtained defect-free images, training a preset image reconstruction model based on the defect-free image sample set to obtain a target image reconstruction model, and inputting a plurality of to-be-detected defect images into the target image reconstruction model for image reconstruction, constructing an image segmentation annotation data set based on an image reconstruction result, training a preset image segmentation model based on the image segmentation annotation data set to obtain a target image segmentation model, obtaining a to-be-detected image of the wafer, inputting the to-be-detected image to the target image segmentation model, and obtaining a to-be-detected image of the wafer; and outputting a defect binary ima