Ultrathin and high-transmittance diamond-like carbon coating and plating method thereof
The invention discloses an ultrathin and high-transmittance diamond-like carbon coating and a plating method thereof, the diamond coating is characterized in that the surface of a base material is a base coat, the base coat is a high-transmittance film layer plated by oxide/nitride, the surface of t...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an ultrathin and high-transmittance diamond-like carbon coating and a plating method thereof, the diamond coating is characterized in that the surface of a base material is a base coat, the base coat is a high-transmittance film layer plated by oxide/nitride, the surface of the base coat is a functional layer, and the functional layer is a high-transmittance and wear-resistant Ta-C film layer plated by taking carbon as a sputtering target material. And a transparent nitride protective layer is arranged on the surface of the functional layer. The plating method comprises the following steps of: plating the oxide/nitride base coat on the surface of the base material by using magnetron sputtering coating, plating the Ta-C film on the base coat by using a magnetic confinement filtering focusing pure ion deposition coating method to serve as the functional layer, and plating the nitride protective layer on the functional layer by using magnetron sputtering coating. The whole film coating pr |
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