Conveying device

The invention provides a conveying device which can uniformly remove electricity of the whole substrate under the condition that the electricity of the substrate is removed. A transport device (4) that transports a substrate (19) is characterized in that the transport device (4) has: a holding plate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHOJI KEIICHI, NITTA SHUJI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY NATURALLY-OCCURRING ELECTRICITY SEMICONDUCTOR DEVICES STATIC ELECTRICITY
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