Conveying device

The invention provides a conveying device which can uniformly remove electricity of the whole substrate under the condition that the electricity of the substrate is removed. A transport device (4) that transports a substrate (19) is characterized in that the transport device (4) has: a holding plate (41) that holds the substrate (19) held by a holding table (30) from above; a moving unit (42) that moves the holding plate (41) in at least a direction in which the substrate (19) is peeled from the holding table (30); and a de-energizing device (44) having an air injection port (440) for injecting ionized air, the air injection port (440) being formed in the holding plate (41) so as to extend along the outer periphery of the substrate (19), and the de-energizing device (44) de-energizing the substrate (19) from the outer periphery side of the substrate (19) at multiple angles. 本发明提供搬送装置，其在将基板除电的情况下，能够将基板整体均匀地除电。搬送装置(4)搬送基板(19)，其特征在于，搬送装置(4)具有：保持板(41)，其从上方对保持工作台(30)所保持的基板(19)进行保持；移动单元(42)，其使保持板(41)在至少使基板(19)从保持工作