Alignment structure of super junction transistor and manufacturing method

The invention provides an alignment structure of a super junction transistor and a manufacturing method. The alignment structure comprises a substrate with a front surface and a back surface opposite to each other; a super junction unit and a plurality of alignment marks are arranged on the substrate, each alignment mark is arranged on the back surface of the substrate, and the super junction unit is arranged on the front surface of the substrate by taking the alignment marks as references. The alignment mark and the super junction unit are respectively arranged on the back surface and the front surface of the substrate, so that the influence of epitaxial growth on the alignment mark is avoided, and the alignment precision is improved. 本发明提供一种超级结晶体管的对准结构及制造方法，包括具有相对的正面和背面的衬底；所述衬底上设有超级结单元和若干对准标记，其中，各所述对准标记设于所述衬底的背面，所述超级结单元以所述对准标记为基准设于所述衬底的正面。本发明通过将对准标记和超级结单元分设在衬底的背面和正面，避免了外延生长对对准标记的影响，提高了对准精度。