Scanning image sub-pixel registration method based on spatial heterodyne interference

The invention discloses a scanning image sub-pixel registration method based on spatial heterodyne interference. The method comprises the steps that 1, a preprocessed spatial heterodyne scanning interference image is adopted; 2, performing fast Fourier transform on the images to obtain corresponding...

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Bibliographische Detailangaben
Hauptverfasser: LI ZHAOLIN, ZHANG WENTAO, YE SONG, LI SHU, ZHANG ZIYANG, CHEN NIYAN, WANG XINQIANG, WANG FANGYUAN
Format: Patent
Sprache:chi ; eng
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