Scanning image sub-pixel registration method based on spatial heterodyne interference
The invention discloses a scanning image sub-pixel registration method based on spatial heterodyne interference. The method comprises the steps that 1, a preprocessed spatial heterodyne scanning interference image is adopted; 2, performing fast Fourier transform on the images to obtain corresponding...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a scanning image sub-pixel registration method based on spatial heterodyne interference. The method comprises the steps that 1, a preprocessed spatial heterodyne scanning interference image is adopted; 2, performing fast Fourier transform on the images to obtain corresponding amplitude spectrums; 3, defining a cross-power spectrum according to the Fourier translation theorem in combination with the amplitude spectrum; 4, inverse Fourier transform is carried out on the cross-power spectrum; 5, acquiring the peak position of the function after inverse transformation as the translation amount between the reference image and the image to be registered; and 6, performing registration by adopting a phase correlation algorithm according to the translation amount. By adopting the method disclosed by the invention, the problem of sub-pixel registration of spatial heterodyne scanning imaging interference image registration can be solved, and the registration precision of interference data is eff |
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