Method for optimizing thermal stress of quartz crystal resonator through structural size parameters
The method for optimizing the thermal stress of the quartz crystal resonator through the structural size parameters comprises the following steps: obtaining the initial thermal stress on a quartz wafer through finite element simulation according to the initial size and material of each component of...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The method for optimizing the thermal stress of the quartz crystal resonator through the structural size parameters comprises the following steps: obtaining the initial thermal stress on a quartz wafer through finite element simulation according to the initial size and material of each component of the quartz crystal resonator; structural size parameters influencing thermal stress are selected, and the levels of the structural size parameters are reasonably selected according to the value ranges of the different structural size parameters, so that a proper orthogonal table is determined; performing finite element analysis according to the test scheme of the orthogonal table to obtain the maximum thermal stress of the quartz crystal resonator with different structural size parameters under different levels; performing range analysis according to an orthogonal test result to obtain a range calculation result of the maximum thermal stress; and according to a range calculation result of the influence factors, tak |
---|