Semiconductor structure with crack blocking three-dimensional structure

Semiconductor structures having crack blocking three-dimensional structures are described. The semiconductor structure includes: a substrate; a functional circuit structure disposed in an area of the substrate; and a three-dimensional structure including at least one continuous trench extending vert...

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Bibliographische Detailangaben
Hauptverfasser: BUFFLET LARRY, VOIRON FREDERIC
Format: Patent
Sprache:chi ; eng
Schlagworte:
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