Semiconductor full life cycle continuous monitoring method, device and equipment
The invention discloses a semiconductor full-life-cycle continuous monitoring method, device and equipment, and the method comprises the steps: embedding an RC oscillator in a semiconductor chip, and enabling the RC oscillator to serve as a sensing device of a semiconductor full-life-cycle aging pro...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a semiconductor full-life-cycle continuous monitoring method, device and equipment, and the method comprises the steps: embedding an RC oscillator in a semiconductor chip, and enabling the RC oscillator to serve as a sensing device of a semiconductor full-life-cycle aging process; and detecting the oscillation frequency and the signal waveform output by the RC oscillator, and judging the aging state of the semiconductor chip according to the change state of the oscillation frequency and the signal waveform. According to the invention, aging detection software does not need to be externally arranged, and full-life-cycle continuous monitoring can be carried out on a semiconductor only through a built-in hardware sensor and acquisition of sensor parameters according to parameter changes, that is, continuous detection of a semiconductor chip from pre-factory test, pre-sales detection and after-sales tracking detection to full-life-cycle of product application is realized. And powerful prod |
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