Shared control type power supply device for wafer processor

The invention discloses a shared control type power supply device for a wafer processor, which adopts a multi-layer vertical power supply structure, and divides a power supply circuit of the wafer processor into a shared control management circuit module and a direct current transformation and power transmission module. And the sharing control management circuit module and the wafer processor are sequentially arranged on the upper surface of the direct-current transformation and power transmission module. The power supply density of the wafer processor system can be effectively improved, the reliability of the power supply system of the wafer processor is improved, the power consumption of the power supply circuit of the wafer processor system is reduced, a digital control type power supply system is realized, and the voltage conversion and control management plane of the power supply system is re-divided; and an integrated solution can be provided for efficient power supply of a high-power wafer processor sy