Silicon wafer wet processing method and system

The invention provides a silicon wafer wet processing method and system, and the system comprises a factory affair system which comprises an instruction receiving module and a liquid medicine preparation module, the instruction receiving module is connected with a control terminal so as to receive an instruction sent by the control terminal, and the liquid medicine preparation module is connected with the factory affair system; the liquid medicine preparation module is used for preparing initial liquid medicine in proportion according to the instruction; the factory service system is communicated with the self-activation system, and the self-activation system is communicated with the wafer processing unit; the self-activation system is used for generating activated liquid medicine according to the initial liquid medicine, and the activated liquid medicine is liquid medicine containing active ingredients; the activation liquid medicine flows into the wafer processing unit through the outlet end of the first se