Piezoelectric device and liquid ejecting head

The invention provides a piezoelectric device and a liquid ejecting head, which can restrain moisture from intruding into a vibrating plate and can restrain damage such as interlayer peeling or cracks of the vibrating plate. A piezoelectric device is provided with: a substrate having a recess; a vib...

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Bibliographische Detailangaben
Hauptverfasser: NISHI TOMOHIRO, SHIMIZU TOSHIHIRO, TONOMURA, OSAMU, SAWAZAKI, TATSUO, KOIKE HARUNOBU, YAMAZAKI YASUSHI, NAKAYAMA MASAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a piezoelectric device and a liquid ejecting head, which can restrain moisture from intruding into a vibrating plate and can restrain damage such as interlayer peeling or cracks of the vibrating plate. A piezoelectric device is provided with: a substrate having a recess; a vibration plate; in a piezoelectric actuator, a vibrating plate has: a first layer containing silicon as a constituent element; a second layer that is disposed between the first layer and the piezoelectric actuator and that contains silicon nitride and at least one metal element selected from among chromium, titanium, aluminum, tantalum, hafnium, and iridium as constituent elements; and a third layer that is disposed between the second layer and the piezoelectric actuator and contains zirconium as a constituent element, and that has a fourth layer on the piezoelectric actuator side of the third layer, the fourth layer containing silicon nitride and at least one metal element selected from the group consisting of chrom