Accurate Raman spectroscopy

A method, system, and non-transitory computer readable medium for precise Raman spectroscopy. The method may include at least one iteration of: (i) performing, by an optical measurement system, a calibration process including (a) finding out a misalignment between a region of interest defined by a spatial filter and an impinging beam of radiation emitted from an illuminated region of a sample, the impinging beam impinging the spatial filter; and (b) determining a compensated propagation path of the impinging beam that compensates for the misalignment; and (ii) performing a measurement procedure while the optical measurement system is configured to provide the compensated propagation path of the impinging beam to provide one or more Raman spectra. 一种用于精确的拉曼光谱法的方法、系统及非暂时性计算机可读介质。所述方法可包括以下步骤的至少一个迭代：(i)由光学测量系统执行校准过程，所述校准过程包含(a)找出由空间滤波器界定的感兴趣区与自样本的经照明区域发射的辐射的撞击束之间的不对准，所述撞击束撞击所述空间滤波器；及(b)判定补偿所述不对准的所述撞击束的补偿传播路径；及(ii)执行测量过程，同时所述光学测量系统经配置以提供所述撞击束的所述补偿传播路径，以提供一或多个拉曼光谱。