Data acquisition method and device of semiconductor process equipment and semiconductor process equipment

The embodiment of the invention provides a data acquisition method and device of semiconductor process equipment and the semiconductor process equipment. The method comprises the following steps: setting an acquisition interval of a data acquisition task for semiconductor process equipment; creating a timer, and setting the timing duration of the timer as an acquisition interval; modifying the operation duration of the operation system for the timer from the default duration to the acquisition interval; and operating the timer, and triggering a data acquisition task for the semiconductor process equipment when the timing of the timer reaches the acquisition interval. According to the data acquisition method and device, the operation duration of the operation system for the timer is modified, so that the operation duration of the operation system for the timer is matched with the acquisition interval, the situation that after timing of the timer is finished, the next data acquisition task needs to be executed