Three-dimensional memory and preparation and operation method and system thereof
The invention provides a three-dimensional memory, a preparation method and an operation method of the three-dimensional memory and a memory system, and the method comprises the steps: forming a laminated structure which comprises insulating layers and sacrificial layers which are alternately stacke...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a three-dimensional memory, a preparation method and an operation method of the three-dimensional memory and a memory system, and the method comprises the steps: forming a laminated structure which comprises insulating layers and sacrificial layers which are alternately stacked on a substrate, and forming a plurality of holes which penetrate through the laminated structure; etching a part of the sacrificial layer close to the hole to form a first groove; forming a ferromagnetic free layer in the first groove; and sequentially forming a tunneling insulating layer and a ferromagnetic pinning layer on the inner wall of the hole.
本申请提供了一种三维存储器及其制备方法、操作方法及存储器系统,所述方法包括:在衬底上形成包括交替堆叠的绝缘层和牺牲层的叠层结构,并形成贯穿叠层结构的多个孔;对靠近孔的部分牺牲层进行刻蚀,以形成第一凹槽;在第一凹槽内形成铁磁自由层;以及在孔内壁依次形成隧穿绝缘层和铁磁钉扎层。 |
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