SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

Embodiments relate to a semiconductor memory device and a method of manufacturing the same. According to one embodiment, a semiconductor memory device includes a substrate (20), a source line (SL), a plurality of word lines (WL), a pillar (MP), and a first member. The plurality of word lines (WL) ar...

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Bibliographische Detailangaben
Hauptverfasser: IWASAKI TAICHI, FUJISHIMA TATSUYA, SHISHIDO MASAYUKI, KAJINO TOMONORI, KIDO NOZOMI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Embodiments relate to a semiconductor memory device and a method of manufacturing the same. According to one embodiment, a semiconductor memory device includes a substrate (20), a source line (SL), a plurality of word lines (WL), a pillar (MP), and a first member. The plurality of word lines (WL) are provided above the source line (SL) so as to be separated from each other in a first direction intersecting the surface of the substrate (20). The pillar (MP) is provided so as to extend in the first direction. The bottom of the pillar (MP) reaches the source line (SL). The first member is provided so as to pass through the source line (SL). The first member has a first portion (UP) farther from the substrate (20) and a second portion (LP) closer to the substrate (20). The first member includes a first contact (CX) and a first insulating film (SP). The first contact (CX) is electrically connected to the substrate (20). The first insulating film (SP) is provided continuously with a side surface portion of the firs