Method and device for correcting angle measurement precision calibration error of precision shafting
The invention discloses a method, a device and equipment for correcting an angle measurement precision calibration error of a precise shafting, and a storage medium. The method comprises the following steps: S1, respectively establishing a measurement optical link and a compensation optical link on...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a method, a device and equipment for correcting an angle measurement precision calibration error of a precise shafting, and a storage medium. The method comprises the following steps: S1, respectively establishing a measurement optical link and a compensation optical link on a shafting rotor and a shafting stator; s2, a compensating mirror is arranged between the measuring light pipe and the polygon mirror, and compensation value measurement of angle measurement precision calibration based on the compensating mirror is carried out; s3, the compensating mirror is removed, and original value measurement of angle measurement precision calibration is carried out; and S4, performing algebraic differencing based on the compensation value of the angle measurement precision calibration and the original value of the angle measurement precision calibration to obtain a precision measurement result of the angle measurement element. According to the method, the device, the equipment and the storage |
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