On-chip integrated three-axis gyroscope assembly based on lithium niobate film

The invention relates to the technical field of sensors, in particular to an on-chip integrated three-axis gyroscope assembly based on a lithium niobate film, which comprises a light-emitting unit, a lithium niobate film chip and a tail fiber unit, the light emitting unit is coupled with the lithium niobate film chip, and the lithium niobate film chip is coupled with the tail fiber unit; the light emitting unit is used for emitting light waves; the lithium niobate film chip is used for splitting, modulating and detecting the light wave; the tail fiber unit is used for light wave propagation. The three-axis gyroscope has the effect of reducing the size of the three-axis gyroscope. 本申请涉及传感器的技术领域，尤其是涉及一种基于铌酸锂薄膜的片上集成三轴陀螺组件，其包括发光单元、铌酸锂薄膜芯片和尾纤单元；所述发光单元与所述铌酸锂薄膜芯片耦合，所述铌酸锂薄膜芯片与所述尾纤单元耦合；所述发光单元用于发射光波；所述铌酸锂薄膜芯片用于对所述光波进行分束、调制及探测；所述尾纤单元用于所述光波传播。本申请具有减小三轴陀螺的体积的效果。