Graphite boat suitable for conductive film deposition

The invention discloses a graphite boat suitable for conductive thin film deposition, and belongs to the technical field of solar cell production, the graphite boat comprises graphite boat sheets, graphite clamping points and connecting structures, the graphite boat sheets comprise outer graphite bo...

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Hauptverfasser: SUN HAILONG, LI WENHONG, NAN ZHIHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a graphite boat suitable for conductive thin film deposition, and belongs to the technical field of solar cell production, the graphite boat comprises graphite boat sheets, graphite clamping points and connecting structures, the graphite boat sheets comprise outer graphite boat sheets and middle graphite boat sheets; the middle graphite boat piece comprises a boat piece body and an electrode connecting plate, and the boat piece body comprises a bearing part and a connecting part; a connecting hole and a clearance hole are formed in the connecting part; the insulating sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve; the inner layer sleeve comprises a mounting hole, a connecting outer wall and a limiting convex ring; the middle-layer sleeve comprises a first sleeve hole and a first containing hole, the diameter of the first containing hole is larger than that of the limiting convex ring, the length of the first containing hole is smaller than that