Power control method of plasma surface modification device

The invention discloses a power control method of a plasma surface modification device. Power control is carried out on a discharge device of equipment for modifying the surface of a metal foil. Comprising the following steps: presetting the running speed of a transmission device and the discharge p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MEI DANHUA, HUANG CHENGSHUO, CUI XINGLEI, LIANG HENGRUI, ZHENG YUYAO, LIU HONGLIN, FANG ZHI, WAN LIANGQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a power control method of a plasma surface modification device. Power control is carried out on a discharge device of equipment for modifying the surface of a metal foil. Comprising the following steps: presetting the running speed of a transmission device and the discharge power of a discharge device corresponding to the speed; discharging equipment is started at preset power, and the actual operation speed v (t) of the metal foil is collected through a speed sensor; obtaining a power adjustment value according to the actual operation speed v (t); the actual operation speed of the transmission device is collected according to a preset period, the power adjustment value at the moment is calculated, and the discharge power of the discharge device is controlled according to the power adjustment value; and correspondingly adjusting the power supply output according to the speed adjustment value. According to the method, the uniformity of the treatment effect of the metal foil is ensured t