Loadlock transmission mechanism in physical vapor deposition (PVD) and chemical vapor deposition (CVD) equipment and control method of Loadlock transmission mechanism

The invention discloses a Loadlock transmission mechanism in PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) equipment and a control method of the Loadlock transmission mechanism, relates to the technical field of Loadlock transmission and control, and aims to solve the problems...

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Bibliographische Detailangaben
Hauptverfasser:	WANG JIN, ZANG YU, WU JINMA, LI JING, CHAN MING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTROLLING CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DIFFUSION TREATMENT OF METALLIC MATERIAL DYNAMO-ELECTRIC MACHINES ELECTRICITY ENGINEERING ELEMENTS AND UNITS GEARING GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS GENERATION HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY PHYSICS REGULATING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	The invention discloses a Loadlock transmission mechanism in PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) equipment and a control method of the Loadlock transmission mechanism, relates to the technical field of Loadlock transmission and control, and aims to solve the problems of poor transmission rigidity of the transmission mechanism and inaccurate positioning precision and repeated positioning precision of the transmission mechanism in the control method of a stepping motor controller as an original stepping motor is connected with a lead screw transmission structure through a synchronizing wheel. According to the technical scheme, the device comprises a Loadlock cavity, and a Loadlock transmission mechanism is arranged below the Loadlock cavity. According to the invention, a module form of integrating the lead screw and the linear guide rail is adopted, so that the overall transmission rigidity is better, and the reliability is higher compared with an original mechanism; the absolute