1-3 composite piezoelectric material for high-frequency ultrasonic transducer and preparation method of 1-3 composite piezoelectric material

The invention relates to a piezoelectric material, in particular to a 1-3 composite piezoelectric material for a high-frequency ultrasonic transducer and a preparation method thereof, and the preparation method comprises the following steps: S1, preparing a soft template containing micropores throug...

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Hauptverfasser: TIAN JUNTING, LI XIAOBING, SUN RUIYU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a piezoelectric material, in particular to a 1-3 composite piezoelectric material for a high-frequency ultrasonic transducer and a preparation method thereof, and the preparation method comprises the following steps: S1, preparing a soft template containing micropores through an etching technology; s2, filling the micropores in the soft template obtained in the step S1 with piezoelectric ceramic powder; s3, performing high-temperature sintering on the product obtained in the step S2 to remove the soft template to obtain a piezoelectric ceramic column array; s4, filling and curing the piezoelectric ceramic column array obtained in the step S3 by using a high-molecular polymer to obtain a semi-finished product; and S5, carrying out grinding thinning, electrode plating and polarization on the semi-finished product obtained in the step S4 to obtain the 1-3 composite piezoelectric material. Compared with the prior art, simplification and high efficiency of the preparation process are reali