Processing device

The present invention does not require a movement mechanism for moving a processing table and does not require a protective cover such as a bellows cover, and is provided with: a processing table 2A and a processing table 2B for holding an object W to be processed; a processing mechanism (3) for pro...

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Bibliographische Detailangaben
Hauptverfasser:	AZUMA HIDEKAZU, HORI SATOKO, SHIRAI KATSUMASA, FUKAI MOTOKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CUTTING DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING,CUTTING-OUT, STAMPING-OUT OR SEVERING DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND CUTTING TOOLS MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PRINTED CIRCUITS SEMICONDUCTOR DEVICES SEVERING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention does not require a movement mechanism for moving a processing table and does not require a protective cover such as a bellows cover, and is provided with: a processing table 2A and a processing table 2B for holding an object W to be processed; a processing mechanism (3) for processing the object to be processed (W) by means of the rotary tool (30) while using a processing liquid; and a movement mechanism (5) for linearly moving the processing mechanism (3) at least in the XY direction on the horizontal plane, and processing the object to be processed (W) with respect to the processing mechanism (3) that is moved by the movement mechanism (5) with respect to the processing table (2A) and the processing table (2B) that are fixed at least in the XY direction. 本发明不需要使加工工作台移动的移动机构且不需要波纹罩等保护罩，且包括：加工工作台2A、加工工作台2B，对加工对象物W加以保持；加工机构3，一面使用加工液一面利用旋转工具30对加工对象物W进行加工；以及移动机构5，使加工机构3至少分别在水平面上的XY方向上直线移动，相对于至少固定于XY方向上的加工工作台2A、加工工作台2B而通过移动机构5移动的加工机构3对加工对象物W进行加工。