Integrated detector on Fabry-Perot interferometer system
The invention relates to an integrated detector on a Fabry-Perot interferometer system. An optical sensor. The optical sensor includes a substrate and a Fabry-Perot interferometer. The substrate is formed of a semiconductor. The Fabry-Perot interferometer includes a first mirror and a second mirror,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an integrated detector on a Fabry-Perot interferometer system. An optical sensor. The optical sensor includes a substrate and a Fabry-Perot interferometer. The substrate is formed of a semiconductor. The Fabry-Perot interferometer includes a first mirror and a second mirror, and is mounted on the substrate such that light is transmitted through the interferometer to the substrate. The substrate is doped such that a region of the substrate to which light is transmitted by the interferometer forms a photodiode.
一种法布里-珀罗干涉仪系统上的集成检测器。一种光学传感器。光学传感器包括基板和法布里-珀罗干涉仪。基板由半导体形成。法布里-珀罗干涉仪包括第一反射镜和第二反射镜,并且安装在基板上,使得光透射通过干涉仪到基板。基板被掺杂,使得光通过干涉仪透射到的基板的区域形成光电二极管。 |
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