Chip point pressing machine and chip mass transfer method

The chip point pressing machine comprises a fixed seat, a horizontal movable seat, a vertical movable seat, a voice coil motor, a piezoelectric ceramic actuator and a flexible ejector pin, the horizontal movable seat is in sliding connection with the fixed seat, the vertical movable seat is in slidi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GUO JIAN, LIU ZIYANG, CHEN XUN, LIM JIN-BAE, LIANG JIE, XIONG JINGANG, DONG LINGZHI, YAO JINGSONG, ZHENG HEHUI, LIU MAOLIN, BAO YILIANG, LIN JIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The chip point pressing machine comprises a fixed seat, a horizontal movable seat, a vertical movable seat, a voice coil motor, a piezoelectric ceramic actuator and a flexible ejector pin, the horizontal movable seat is in sliding connection with the fixed seat, the vertical movable seat is in sliding connection with the horizontal movable seat, the voice coil motor is arranged at one end of the fixed seat, and the piezoelectric ceramic actuator is arranged at the other end of the fixed seat. The output end of the voice coil motor is connected with the horizontal movable seat, the piezoelectric ceramic actuator is arranged on the vertical movable seat, the top end of the flexible ejector pin abuts against the telescopic end of the piezoelectric ceramic actuator, and the bottom end of the flexible ejector pin extends to the position below the vertical movable seat. A voice coil motor and a piezoelectric ceramic actuator are adopted as power sources for controlling the flexible ejector pin to move in the x-axis