Transmission electron microscope sample irradiation device based on ion implanter and temperature control method
The invention discloses a transmission electron microscope sample irradiation device based on an ion implanter and a temperature control method, the transmission electron microscope sample irradiation device comprises an aperture partition plate, a sample table, a cooling control system and a heatin...
Gespeichert in:
Hauptverfasser: | , , , , , , , , , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a transmission electron microscope sample irradiation device based on an ion implanter and a temperature control method, the transmission electron microscope sample irradiation device comprises an aperture partition plate, a sample table, a cooling control system and a heating control system, the center of the aperture partition plate is provided with a penetrating light-transmitting aperture, and a sample is fixed on an irradiation surface through a fixing assembly; the cooling control system is arranged in the sample table, and the heating control system is arranged on one side of the sample table; according to the ion beam irradiation device, the aperture partition plate is arranged in the vertical emitting direction of the ion beam, the light-transmitting aperture is arranged in the center of the aperture partition plate, the dispersed ion beam is uniformly emitted to the sample table through the light-transmitting aperture, and the sample on the irradiation surface is irradiated; |
---|