Transmission electron microscope sample irradiation device based on ion implanter and temperature control method

The invention discloses a transmission electron microscope sample irradiation device based on an ion implanter and a temperature control method, the transmission electron microscope sample irradiation device comprises an aperture partition plate, a sample table, a cooling control system and a heatin...

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Hauptverfasser: PAN RONGJIAN, GU JIANTAO, JIANG YAN, MAO JIANJUN, YANG FAN, ZHANG HAISHENG, QIN JIANTAO, WU LU, WU XIAOYONG, MO HUAJUN, NING ZHIEN, SONG XIAORONG, WEN BANG, ZHANG WEI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a transmission electron microscope sample irradiation device based on an ion implanter and a temperature control method, the transmission electron microscope sample irradiation device comprises an aperture partition plate, a sample table, a cooling control system and a heating control system, the center of the aperture partition plate is provided with a penetrating light-transmitting aperture, and a sample is fixed on an irradiation surface through a fixing assembly; the cooling control system is arranged in the sample table, and the heating control system is arranged on one side of the sample table; according to the ion beam irradiation device, the aperture partition plate is arranged in the vertical emitting direction of the ion beam, the light-transmitting aperture is arranged in the center of the aperture partition plate, the dispersed ion beam is uniformly emitted to the sample table through the light-transmitting aperture, and the sample on the irradiation surface is irradiated;