Semiconductor temperature control equipment simulation method and system and vibration monitoring method and system

The invention relates to the technical field of semiconductors, in particular to a semiconductor temperature control equipment simulation method and system and a vibration monitoring method and system.The semiconductor temperature control equipment simulation method comprises the steps that vibratio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NING TENGFEI, LI XUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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