Semiconductor temperature control equipment simulation method and system and vibration monitoring method and system

The invention relates to the technical field of semiconductors, in particular to a semiconductor temperature control equipment simulation method and system and a vibration monitoring method and system.The semiconductor temperature control equipment simulation method comprises the steps that vibration acceleration data of the top of a compressor of a physical model machine are obtained; obtaining vibration displacement data according to the vibration acceleration data; establishing a simulation model of the semiconductor temperature control equipment; performing harmonic response analysis based on the simulation model and the vibration displacement data to obtain frequency response force; determining that the frequency response force meets a set target value requirement; and recording the vibration acceleration data and the simulation model. A semi-physical simulation system is realized by adopting a harmonic response simulation analysis method, frequency response force is quickly fed back through linear super