Measurement system and method for checking mass charge

The invention provides a measurement system and method for testing mass charges, and belongs to the field of precision measurement, and the method comprises the steps: placing parallel polar plates on two sides of a testing mass, the parallel polar plates are parallel to the surface of the testing mass, and the distances between the parallel polar plates and the testing mass are equal; excitation voltage is applied to the parallel pole plates, so that the inspection mass generates certain angular displacement; converting the angular displacement signal into a voltage signal by adopting a displacement sensor; voltage signals output by the displacement sensor are input to the controller, and needed control torque is output; feedback voltage corresponding to the control torque is calculated through an amplitude algorithm, then the feedback voltage is applied to the parallel pole plates through an electrostatic execution machine, and the inspection mass is finally returned to the initial position through electros