Coating apparatus, thin film manufacturing system, and thin film manufacturing method

The rod coater (3) is provided with a rod (11) and a blower (13). The rod (11) applies a coating liquid to a base material (S). The rod (11) extends in the axial direction orthogonal to the movement direction (MD) of the base material (S). On the upstream side in the movement direction (MD) of the r...

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Bibliographische Detailangaben
Hauptverfasser:	MURAKAMI MASAHIRO, OMAE MICHIHIRO, YAMASHITA YUJI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	The rod coater (3) is provided with a rod (11) and a blower (13). The rod (11) applies a coating liquid to a base material (S). The rod (11) extends in the axial direction orthogonal to the movement direction (MD) of the base material (S). On the upstream side in the movement direction (MD) of the rod (11), a liquid storage part (L) in which the coating liquid is stored is formed between the rod (11) and the base material (S). The blower (13) presses a contact portion (P) of the substrate (S) that is in contact with the liquid reservoir (L). 棒涂机(3)具备棒(11)和鼓风机(13)。棒(11)对基材(S)涂布涂敷液。棒(11)沿与基材(S)的移动方向(MD)正交的轴向延伸。在棒(11)的移动方向(MD)上的上游侧，在棒(11)与基材(S)之间形成有积存有涂敷液的液体积存部(L)。鼓风机(13)对基材(S)中的与液体积存部(L)接触的接触部分(P)进行按压。