Vacuum monochromator structure working under semi-vacuum and semi-atmospheric conditions

The invention discloses a vacuum monochromator structure working under semi-vacuum and semi-atmospheric conditions. The vacuum monochromator structure comprises a shell, an incident unit, a light splitting unit, an emergent unit and a driving unit, the shell comprises a vacuum cabin, and a driving cabin is fixedly connected to the bottom end of the vacuum cabin; the incident unit and the emergent unit are both communicated with the vacuum chamber and are arranged at an angle; the light splitting unit is arranged in the vacuum cabin, the incident unit and the emergent unit are arranged corresponding to the light splitting unit, the bottom end of the light splitting unit penetrates through the bottom wall of the vacuum cabin through a cabin penetrating part and is rotationally connected with the bottom wall of the vacuum cabin, and the bottom end of the light splitting unit extends out of the vacuum cabin; and the driving unit is in transmission connection with the light splitting unit and is fixedly mounted in